Fabrication of Micro Optical Sensors from Polymers

Thorben Ziemer, M.Sc.



HIMT uPG101 laser lithography system at Clausthal UT. Photo: Kreutzmann

Lithographic production of complex optical waveguides from polymers


HIMT uPG101 laser lithography system. Photo: Ziemer

Scope (excerpt)

  • Selection and comparison of polymer materials
  • Optimization of production techniques and processes
    • coating
    • exposure
    • thermal treatment
    • pre and post processing
  • development and optimization of test procedures
  • Production of polarization-maintaining polymer waveguides
  • simulation

State of the Art/Motivation

  • Modern polymers are highly versatile materials and metamaterials. They can be specifically tailored to meet different demands. Hence, they are very well suited for production of electronic, mechanical and optical micro components. Modification can be achieved, for example, by
    • embedding nano particles
    • structuring molecular chains
    • combining different materials
  • Polymeric MEMS (MicroElectroMechanical Systems) are already state of the art
  • Integrated single-mode optical waveguides are currently mainly realized in semiconductor materials
  • Newest systems for laser lithography are capable of structuring polymeric films with sub-micron resolution even without the use of masks


  • Evaluation of methods for invoking birefringence in polymers to create polarization maintaining polymer waveguides
  • Coupling of linearly polarized laser light into the produced waveguides and investigation of the polarization extinction ratio in respect to environmental influences
Manipulation of a coated glass substrate in the clean room at Clausthal UT. Photo: Kreutzmann

Measuring of Polarization

Polarization-maintaining properties of the polymers and the photolithographically fabricated structures are evaluated using a by the Institute of Electrical Information Technology specifically constructed measuring tool. The polarization state of the electromagnetic radiation is here determined by utilizing a combination of waveplate and polarizer, measuring of intensity and automatically, computer-assisted data acquisition.

System for the automatic measuring of the polarization state of infrared laser radiation. Photo: Ziemer
Principle of a Poincaré sphere with the components of the Stokes vector. Source: Richter, 2018.

Construction and realization of this system were carried out in the context of a student final thesis.

Richter, Andreas (2018): Konstruktion und Aufbau eines Polarisationsmesssystems für Laserstrahlung bei einer Wellenlänge von 1550 nm. Master's Thesis. Clausthal University of Technology, Clausthal-Zellerfeld. Institute for Electrical Information Technology.

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